Abstract: The dislocation of Nd∶YAG crystal was studied by chemical etching method. The results indicate that the exhibition of the dislocation would be affected by corrosion temperature, corrosion time and corrosive agents. The exhibition of the dislocation was distinctive when the crystal was corroded by the concentrated phosphate acid at 220 ℃ for 20 min,and the pattern of etch pits was rhombus.By calculation, the dislocation density is about 10~3 cm~(-2). It was shown that the etch pit sizes and shapes of dislocation was different when the sample was corroded by the same corrosive under various etching time. At the same time , the dislocation pile-up groups was found on the edge of samples.

Key words: The dislocation of Nd∶YAG crystal was studied by chemical etching method. The results indicate that the exhibition of the dislocation would be affected by corrosion temperature, corrosion time and corrosive agents. The exhibition of the dislocation was distinctive when the crystal was corroded by the concentrated phosphate acid at 220 ℃ for 20 min,and the pattern of etch pits was rhombus.By calculation, the dislocation density is about 10~3 cm~(-2). It was shown that the etch pit sizes and shapes of dislocation was different when the sample was corroded by the same corrosive under various etching time. At the same time , the dislocation pile-up groups was found on the edge of samples.