Influence of Growth and Annealing Temperatures on Properties of ZnO Thin Films Prepared by RF Magnetron Sputtering

Welcome to Journal of Synthetic Crystals! Today is

E-mail Alert　

RSS

Share:

JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (5): 1119-1123.

Previous Articles Next Articles

Influence of Growth and Annealing Temperatures on Properties of ZnO Thin Films Prepared by RF Magnetron Sputtering

WANG Bin;ZHAO Zi-wen;QIU Yu;MA Jin-xue;ZHANG He-qiu;HU Li-zhong

Online:2010-10-15 Published:2021-01-20

Abstract

CLC Number:

O472

WANG Bin;ZHAO Zi-wen;QIU Yu;MA Jin-xue;ZHANG He-qiu;HU Li-zhong. Influence of Growth and Annealing Temperatures on Properties of ZnO Thin Films Prepared by RF Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2010, 39(5): 1119-1123.

[1]	MO Qiuyan, ZHANG Song, JING Tao, WU Jiayin. First-Principles Study on the Adsorption of SO₂ and CO on ReS₂ Surface [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2025, 54(1): 107-114.
[2]	LAN Feifei, LIU Shasha, FANG Shishu, WANG Yingmin, CHENG Hongjuan. Research Progress on Controlling the Thermal Boundary Resistance of GaN on Diamond [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(6): 913-921.
[3]	XU Zhonghui, XU Shengyuan, LIU Chuanchuan, LIU Guogang. First-Principles Study on Photogalvanic Effect and Strain Engineering of Monolayer SnS [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(4): 676-683.
[4]	MENG Wenli, ZHANG Yumin, SUN Yuanhang, WANG Jianfeng, XU Ke. Influence of TiN and Ti Insertion Layer on Ohmic Contact Performance Between ITO and GaN [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(9): 1609-1616.
[5]	WANG Zhengpeng, ZHANG Chongde, SUN Xinyu, HU Tiancheng, CUI Mei, ZHANG Yijun, GONG Hehe, REN Fangfang, GU Shulin, ZHANG Rong, YE Jiandong. MOCVD Epitaxy of β-Ga₂O₃ Films on Off-Cut Angled Sapphire Substrates and Fabrication of Solar-Blind Ultraviolet Photodetector [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(6): 1007-1015.
[6]	YANG Fan, XU Bingshe, DONG Hailiang, ZHANG Aiqin, LIANG Jian, JIA Zhigang. Two-Dimensional Electron Gas Density Studies in AlGaN/GaN Nanoheterostructures [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(6): 1136-1144.
[7]	LIANG Xiao, LI Siqi, WANG Zhongwei, SHAO Pengfei, CHEN Songlin, TAO Tao, XIE Zili, LIU Bin, CHEN Dunjun, ZHENG Youdou, ZHANG Rong, WANG Ke. Study on Molecular Beam Epitaxy of High Al Content AlGaN Thin Films and Si Doping [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(5): 783-790.
[8]	GE Chang, ZHOU Guoxiang, QIN Xuchen, WANG Guang, YAN Tongtong, LI Jia. Electronic and Piezoelectric Properties of Two-Dimensional Janus Chromium Dichalcogenides [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(4): 613-620.
[9]	XU Zhonghui, ZHAO Shuliang, LIU Chuanchuan. First-Principles Study on Photogalvanic Effect of Vacancy Defects on Monolayer 2H-MoTe₂ [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(12): 2048-2054.
[10]	ZHAO Zinan, WU Jintao, LIANG Zhijian, ZHU Yabin, LIU Ge, CHEN Yunlin. Effect of Sputtering Plume and Substrate Angle on the Optical Properties of Oxygen-Doped Molybdenum Disulfide Film [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(11): 1871-1877.
[11]	LIANG Zhihua, TAN Qiuhong, WANG Qianjin, LIU Yingkai. First-Principles Study on the Electronic Structure and Optical Properties of GeS/MoS₂ Heterojunction [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(3): 459-470.
[12]	PAN Baojun, ZHANG Lijie, WANG Peijian. Progress in the Preparation and Opto-Electro-Magneto Application of Two-Dimensional Layered Metal Iodides [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(3): 538-550.
[13]	YANG Weixia, ZHANG Hexiang, PAN Fengchun, LIN Xueling. Electronic Structures and Optical Properties of Ru, Rh, Pd Doped GaSb [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(11): 2019-2026.
[14]	ZHANG Qin, XIE Quan, YANG Wensheng, HUANG Sili. Electronic Structure and Optical Properties of K and Ti Doped Mg₂Si by First-Principles Study [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(9): 1625-1632.
[15]	CHEN Song, MAO Wenwei, WANG Weiguo. Mechanical Properties and Thermoelectric Transport Performance of Mg₂Sn from First-Principle Calculations [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(9): 1633-1639.

Influence of Growth and Annealing Temperatures on Properties of ZnO Thin Films Prepared by RF Magnetron Sputtering

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments