Limitation in the Thickness of Poly-SiC Ring along the Edge of 6H-SiC Single Crystal Ingot

JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (5): 1124-1129.

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Limitation in the Thickness of Poly-SiC Ring along the Edge of 6H-SiC Single Crystal Ingot

FENG Xian-feng;CHEN Zhi-ming;PU Hong-bin

Online:2010-10-15 Published:2021-01-20

Abstract

CLC Number:

O782.7

FENG Xian-feng;CHEN Zhi-ming;PU Hong-bin. Limitation in the Thickness of Poly-SiC Ring along the Edge of 6H-SiC Single Crystal Ingot[J]. Journal of Synthetic Crystals, 2010, 39(5): 1124-1129.

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Limitation in the Thickness of Poly-SiC Ring along the Edge of 6H-SiC Single Crystal Ingot

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