Study on Patterned Sapphire Substrate by Wet Etching

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (6): 1443-1445.

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Study on Patterned Sapphire Substrate by Wet Etching

SHAO Hui-hui;LI Shu-qiang;QU Shuang;LI Yu-feng;WANG Cheng-xin;XU Xian-gang

Online:2010-12-15 Published:2021-01-20

Abstract

CLC Number:

O611

SHAO Hui-hui;LI Shu-qiang;QU Shuang;LI Yu-feng;WANG Cheng-xin;XU Xian-gang. Study on Patterned Sapphire Substrate by Wet Etching[J]. Journal of Synthetic Crystals, 2010, 39(6): 1443-1445.

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Study on Patterned Sapphire Substrate by Wet Etching

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