A Novel Structure Zone Model of Pure Cr Films Relating to the Magnetron Sputtering System

JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (4): 1071-1075.

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A Novel Structure Zone Model of Pure Cr Films Relating to the Magnetron Sputtering System

LI Hong-tao;JIANG Bai-ling;YANG Bo;CAO Zheng

Online:2011-08-15 Published:2021-01-20

Abstract

CLC Number:

TK124

LI Hong-tao;JIANG Bai-ling;YANG Bo;CAO Zheng. A Novel Structure Zone Model of Pure Cr Films Relating to the Magnetron Sputtering System[J]. Journal of Synthetic Crystals, 2011, 40(4): 1071-1075.

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A Novel Structure Zone Model of Pure Cr Films Relating to the Magnetron Sputtering System

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