Research on Preparation of Large Grain Size Polycrystalline Silicon Thin Films by Aluminum-induced Crystallization from Nanocrystalline Silicon

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (6): 1387-1393.

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Research on Preparation of Large Grain Size Polycrystalline Silicon Thin Films by Aluminum-induced Crystallization from Nanocrystalline Silicon

FANG Ru;SHEN Hong-lie;WU Tian-ru;LIU Bin;SHEN Jian-cang

Online:2011-12-15 Published:2021-01-20

Abstract

CLC Number:

O484.1
TB34

FANG Ru;SHEN Hong-lie;WU Tian-ru;LIU Bin;SHEN Jian-cang. Research on Preparation of Large Grain Size Polycrystalline Silicon Thin Films by Aluminum-induced Crystallization from Nanocrystalline Silicon[J]. Journal of Synthetic Crystals, 2011, 40(6): 1387-1393.

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Research on Preparation of Large Grain Size Polycrystalline Silicon Thin Films by Aluminum-induced Crystallization from Nanocrystalline Silicon

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