Influence of the Mixture Gases Ratio on the Angular Distribution of Silicon Nanoparticles

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (3): 670-674.

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Influence of the Mixture Gases Ratio on the Angular Distribution of Silicon Nanoparticles

ZHAI Xiao-lin;WANG Ying-long;DING Xue-cheng;DENG Ze-chao;CHU Li-zhi;FU Guang-sheng

Online:2012-06-15 Published:2021-01-20

Abstract

CLC Number:

O731

ZHAI Xiao-lin;WANG Ying-long;DING Xue-cheng;DENG Ze-chao;CHU Li-zhi;FU Guang-sheng. Influence of the Mixture Gases Ratio on the Angular Distribution of Silicon Nanoparticles[J]. Journal of Synthetic Crystals, 2012, 41(3): 670-674.

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Influence of the Mixture Gases Ratio on the Angular Distribution of Silicon Nanoparticles

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