Simulation of Flow and Thermal Field in a PECVD Reaction Chamber

JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (4): 1030-1036.

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Simulation of Flow and Thermal Field in a PECVD Reaction Chamber

XIA Huan-xiong;XIANG Dong;MOU Peng;JIANG Wei;GE Yan;WANG Li-dan

Online:2012-08-15 Published:2021-01-20

Abstract

CLC Number:

TB71

XIA Huan-xiong;XIANG Dong;MOU Peng;JIANG Wei;GE Yan;WANG Li-dan. Simulation of Flow and Thermal Field in a PECVD Reaction Chamber[J]. Journal of Synthetic Crystals, 2012, 41(4): 1030-1036.

Simulation of Flow and Thermal Field in a PECVD Reaction Chamber

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