Effect of Substrate Bias on the cBN Film Deposition by Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (4): 853-857.

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Effect of Substrate Bias on the cBN Film Deposition by Magnetron Sputtering

XU Feng;ZUO Dun-wen;ZHANG Xu-hui;HU Hai-feng;WANG Min

Online:2012-08-15 Published:2021-01-20

Abstract

CLC Number:

TB43

XU Feng;ZUO Dun-wen;ZHANG Xu-hui;HU Hai-feng;WANG Min. Effect of Substrate Bias on the cBN Film Deposition by Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2012, 41(4): 853-857.

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Effect of Substrate Bias on the cBN Film Deposition by Magnetron Sputtering

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