Preparation of Transparent Conducting ZnO∶ Zr Films Deposited by DC Reactive Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (4): 977-981.

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Preparation of Transparent Conducting ZnO∶ Zr Films Deposited by DC Reactive Magnetron Sputtering

ZHANG Hua-fu;LEI Cheng-xin;LIU Han-fa;YUAN Chang-kun

Online:2012-08-15 Published:2021-01-20

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ZHANG Hua-fu;LEI Cheng-xin;LIU Han-fa;YUAN Chang-kun. Preparation of Transparent Conducting ZnO∶ Zr Films Deposited by DC Reactive Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2012, 41(4): 977-981.

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Preparation of Transparent Conducting ZnO∶ Zr Films Deposited by DC Reactive Magnetron Sputtering

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