Effects of Substrate Temperature Control Methods on DC Arc Discharge Plasma Chemical Vapor Deposition Diamond Film

JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (6): 1554-1560.

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Effects of Substrate Temperature Control Methods on DC Arc Discharge Plasma Chemical Vapor Deposition Diamond Film

ZHANG Xiang-hui;WANG Ling;LONG Jian-ping

Online:2012-12-15 Published:2021-01-20

Abstract

CLC Number:

O782.+7

ZHANG Xiang-hui;WANG Ling;LONG Jian-ping. Effects of Substrate Temperature Control Methods on DC Arc Discharge Plasma Chemical Vapor Deposition Diamond Film[J]. Journal of Synthetic Crystals, 2012, 41(6): 1554-1560.

Effects of Substrate Temperature Control Methods on DC Arc Discharge Plasma Chemical Vapor Deposition Diamond Film

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