Three-dimensional Simulation of Silane Thermal Decomposition in Polysilicon Production

JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (6): 1587-1594.

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Three-dimensional Simulation of Silane Thermal Decomposition in Polysilicon Production

HUANG Guo-qiang;PAN Jin-hua;MAO Jun-nan;WANG Hong-xing;FAN Jiang-yang

Online:2012-12-15 Published:2021-01-20

Abstract

CLC Number:

TQ150.1

HUANG Guo-qiang;PAN Jin-hua;MAO Jun-nan;WANG Hong-xing;FAN Jiang-yang. Three-dimensional Simulation of Silane Thermal Decomposition in Polysilicon Production[J]. Journal of Synthetic Crystals, 2012, 41(6): 1587-1594.

Three-dimensional Simulation of Silane Thermal Decomposition in Polysilicon Production

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