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JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (6): 1757-1761.
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TANG Zheng-xia;SHEN Hong-lie;JIANG Feng;ZHANG Lei
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RSSPublished:2021-01-20
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TANG Zheng-xia;SHEN Hong-lie;JIANG Feng;ZHANG Lei. Investigation on Preparation of Polycrystalline Silicon by AIC and Epitaxial Growth of Polycrystalline Silicon by HWCVD at Low Temperature[J]. Journal of Synthetic Crystals, 2012, 41(6): 1757-1761.
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