Mechanism and Experiment on Lapping SiC Single Crystal Wafer

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (10): 2065-2070.

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Mechanism and Experiment on Lapping SiC Single Crystal Wafer

LI Shu-juan;HU Hai-ming;LI Yan;GAO Xin-qin

Published:2021-01-20

Abstract

CLC Number:

TG580

LI Shu-juan;HU Hai-ming;LI Yan;GAO Xin-qin. Mechanism and Experiment on Lapping SiC Single Crystal Wafer[J]. Journal of Synthetic Crystals, 2013, 42(10): 2065-2070.

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Mechanism and Experiment on Lapping SiC Single Crystal Wafer

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