Effect of H2 Flow Rates on the Microstructure and Optical Properties of a-Si∶ H Films Prepared by DC Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (11): 2280-2287.

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Effect of H2 Flow Rates on the Microstructure and Optical Properties of a-Si∶ H Films Prepared by DC Magnetron Sputtering

QIAO Yong-peng;JIANG Bai-ling;LU Yuan-yuan;NIU Yi;ZHANG Yan

Online:2013-11-15 Published:2021-01-20

Abstract

CLC Number:

TB321

QIAO Yong-peng;JIANG Bai-ling;LU Yuan-yuan;NIU Yi;ZHANG Yan. Effect of H2 Flow Rates on the Microstructure and Optical Properties of a-Si∶ H Films Prepared by DC Magnetron Sputtering[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(11): 2280-2287.

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Effect of H2 Flow Rates on the Microstructure and Optical Properties of a-Si∶ H Films Prepared by DC Magnetron Sputtering

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