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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (11): 2304-2308.

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Effect of Vacuum Annealing Temperature on the Properties of Amorphous In-Ga-Zn-O Thin Films Prepared by RF Magnetron Sputtering

YAN Xiao-bing;ZHANG Er-peng;JIA Chang-jiang;SHI Shou-shan;LOU Jian-zhong;LIU Bao-ting   

  • Online:2013-11-15 Published:2021-01-20

CLC Number: