Effect of Porous Silicon Gettering on the Electrical Properties of Monocrystalline Silicon Wafer

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (11): 2364-2368.

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Effect of Porous Silicon Gettering on the Electrical Properties of Monocrystalline Silicon Wafer

LI Jia-yan;YOU Xiao-gang;TAN Yi;GUO Su-xia

Online:2013-11-15 Published:2021-01-20

Abstract

CLC Number:

TN304

LI Jia-yan;YOU Xiao-gang;TAN Yi;GUO Su-xia. Effect of Porous Silicon Gettering on the Electrical Properties of Monocrystalline Silicon Wafer[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(11): 2364-2368.

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Effect of Porous Silicon Gettering on the Electrical Properties of Monocrystalline Silicon Wafer

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