Simulation and Optimization of Temperature Field for Large-scale Nitride MOCVD Reactor with Electromagnetic Heating

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (11): 2401-2405.

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Simulation and Optimization of Temperature Field for Large-scale Nitride MOCVD Reactor with Electromagnetic Heating

LI Zhi-ming;JIANG Hai-ying;LI Jin-ping;GAN Xiao-bing;HU Shi-gang

Online:2013-11-15 Published:2021-01-20

Abstract

CLC Number:

TN305

LI Zhi-ming;JIANG Hai-ying;LI Jin-ping;GAN Xiao-bing;HU Shi-gang. Simulation and Optimization of Temperature Field for Large-scale Nitride MOCVD Reactor with Electromagnetic Heating[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(11): 2401-2405.

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Simulation and Optimization of Temperature Field for Large-scale Nitride MOCVD Reactor with Electromagnetic Heating

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