Preparation of IGZO Amorphous Transparent Conductive Thin Films by RF Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (2): 226-229.

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Preparation of IGZO Amorphous Transparent Conductive Thin Films by RF Magnetron Sputtering

LIANG Chao-xu;LI Shuai-shuai;WANG Xue-xia;LI Yan-hui;SONG Shu-mei;YANG Tian-lin

Online:2013-02-15 Published:2021-01-20

Abstract

CLC Number:

TN304.2

LIANG Chao-xu;LI Shuai-shuai;WANG Xue-xia;LI Yan-hui;SONG Shu-mei;YANG Tian-lin. Preparation of IGZO Amorphous Transparent Conductive Thin Films by RF Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2013, 42(2): 226-229.

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Preparation of IGZO Amorphous Transparent Conductive Thin Films by RF Magnetron Sputtering

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