Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (2): 273-277.

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Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

MA Peng-fei;WANG Ke-dong;CHANG Fang-gao;SONG Gui-lin;YANG Hai-gang;WANG Tian-xing

Online:2013-02-15 Published:2021-01-20

Abstract

CLC Number:

O77+4

MA Peng-fei;WANG Ke-dong;CHANG Fang-gao;SONG Gui-lin;YANG Hai-gang;WANG Tian-xing. Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities[J]. Journal of Synthetic Crystals, 2013, 42(2): 273-277.

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[3]	MA Peng-fei;LIU Zhong-shan;CHANG Fang-gao;SONG Gui-lin;WANG Ke-dong. Irradiated Damages of Femtosecond Laser in Two Different Monocrystalline Silicon Wafers [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(1): 99-104.

Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

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