Research on the Formation Mechanism of Crystal Group in Fabricating Poly-Si Thin Film

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (2): 278-281.

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Research on the Formation Mechanism of Crystal Group in Fabricating Poly-Si Thin Film

JIN Rui-min;CAI Zhi-duan;CANG Li-min;YAN Tao;XU Jian-jun;LI Shu-zeng

Online:2013-02-15 Published:2021-01-20

Abstract

CLC Number:

TM914.4+2

JIN Rui-min;CAI Zhi-duan;CANG Li-min;YAN Tao;XU Jian-jun;LI Shu-zeng. Research on the Formation Mechanism of Crystal Group in Fabricating Poly-Si Thin Film[J]. Journal of Synthetic Crystals, 2013, 42(2): 278-281.

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Research on the Formation Mechanism of Crystal Group in Fabricating Poly-Si Thin Film

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