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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (3): 402-407.

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Influence of TMS Flow Rate on SiC Films Deposited on Cemented Carbide Substrates

HEI Hong-jun;YU Sheng-wang;LIU Yan-qing;DING Ming-hui;LI Yi-feng;TANG Wei-zhong   

  • Online:2013-03-15 Published:2021-01-20

CLC Number: