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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (3): 418-422.
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ZHANG Lin-rui;ZHOU Bing-qing;ZHANG Li-li;LI Hai-quan
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RSSOnline:2013-03-15
Published:2021-01-20
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ZHANG Lin-rui;ZHOU Bing-qing;ZHANG Li-li;LI Hai-quan. Influence of RF-power on Microstructure and Properties of Microcrystalline Silicon Thin Films[J]. Journal of Synthetic Crystals, 2013, 42(3): 418-422.
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