Effects of Carbonization Temperature on the Crystal Quality and Surface Morphology of Heteroepitaxial 3C-SiC Films

Welcome to JOURNAL OF SYNTHETIC CRYSTALS! Today is

E-mail Alert　

RSS

Share:

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (5): 856-859.

Previous Articles Next Articles

Effects of Carbonization Temperature on the Crystal Quality and Surface Morphology of Heteroepitaxial 3C-SiC Films

SHI Biao;LIU Xue-chao;ZHOU Ren-wei;YANG Jian-hua;ZHENG Yan-qing;SHI Er-wei

Online:2013-05-15 Published:2021-01-20

Abstract

CLC Number:

O77

SHI Biao;LIU Xue-chao;ZHOU Ren-wei;YANG Jian-hua;ZHENG Yan-qing;SHI Er-wei. Effects of Carbonization Temperature on the Crystal Quality and Surface Morphology of Heteroepitaxial 3C-SiC Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(5): 856-859.

[1]	HUANG Li;RUAN Yongfeng. Radiation Damage and Annealing Characteristics of Neutron-Irradiated 6H-SiC Single Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2020, 49(10): 1794-1799.
[2]	YANG Jinfeng;SHANG Jifang;LI Qinglian;MAO Qianhui;HAO Haoshan;SUN Jun. Study on High Temperature Lithium-rich Diffusion Process of Lithium Tantalate Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2020, 49(6): 1010-1015.
[3]	FANG Sheng-hao;XIE Hua;YANG Shun-da;ZHUANG Wei;YE Ning. Study on Point Defects of ZnGeP2 Crystal in 2-2.5μm [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(12): 2169-2173.
[4]	DAI Sheng-ya;HUANG Zhen-jin;LIU Zhu-ping;GAO Chang-you;WANG Dong-hai;PANG Xu. One-step Process for Eliminating Internal Stress in Sapphire Crystal Materials [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(10): 1860-1862.
[5]	LIAO Jiang-he;LI Yong;TAN De-bin;SHE Yan-chao;WANG Ying;DENG Tao. Synthesis and Color Centers Study on Diamond Doping with CH4N2S under High Pressure [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(9): 1626-1630.
[6]	LI Qing-lian;SHANG Ji-fang;WU Jing;ZHANG Ling;SUN Jun. Fabrication of Lithium Tantalate Crystals Electro-optic Q-switch [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(5): 812-816.
[7]	WANG Zhi-quan;WANG Yu;LI Xiang;NI Ming-hao;CHEN Ye;LI Bo. Boltzmann Model of NV Color Center Concentration and Annealing Temperature [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(5): 822-826.
[8]	XU Yong-kuan;JIN Lei;CHENG Hong-juan;SHI Yue-zeng;ZHANG Li;QI Hai-tao. Defects Investigation of AlN Crystals with Different Colors [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2018, 47(7): 1340-1345.
[9]	ZHOU Qi;WANG Hu;QI Hong-ji;WU Jian-chun. First Principles Calculation on Point Defect of Al Substituting for K in KDP Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2018, 47(6): 1157-1162.
[10]	FAN Chun-li;CHENG You-fa;LIU Ji-yi;WANG Yue;ZHU Hong-wei;MA Xiao. Study on the Origin of Diamond Cutting Method [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(6): 1191-1196.
[11]	XIE Su-jun;OUYANG Shi-liang;DENG Ke;ZHAO He-ping. Analysis of Defect States for Spoof Surface Acoustic Waves Based on Finite Element Method and Supercell Method [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(2): 381-384.
[12]	. Study on Improvement of ZnGeP2 Single Crystal Properties by Annealing and Electron Irradiation Composite Process [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(7): 1723-1726.
[13]	ZENG Ti-xian;HU Yong-qin;YANG Hui;WANG Mao-zhou;ZHANG Min;FAN Long;WU Wei-dong. Study on the Al Impurity-Zn Intrinsic Composite Defects in ZnO Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(6): 1508-1513.
[14]	WU Xiao-juan;ZHAO Xin. Study on Improved Synthesis Technology of AgGaS2 Polycrystal [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(6): 1608-1610.
[15]	LIU Bo;ZANG Chuan-yi;YUAN Heng-xin;CHEN Xiao-zhou;LI Ming. Study on Morphology Changes of Metal Inclusions in Large Diamond Single Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(5): 1191-1197.

Effects of Carbonization Temperature on the Crystal Quality and Surface Morphology of Heteroepitaxial 3C-SiC Films

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments