Effect of Different Abrasives on Sapphire Chemical-Mechanical Polishing

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (6): 1064-1069.

Previous Articles Next Articles

Effect of Different Abrasives on Sapphire Chemical-Mechanical Polishing

XIONG Wei;CHU Xiang-feng;DONG Yong-ping;BI Lei;YE Ming-fu;SUN Wen-qi

Online:2013-06-15 Published:2021-01-20

Abstract

CLC Number:

TN305.2

XIONG Wei;CHU Xiang-feng;DONG Yong-ping;BI Lei;YE Ming-fu;SUN Wen-qi. Effect of Different Abrasives on Sapphire Chemical-Mechanical Polishing[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(6): 1064-1069.

[1]	MA Rui;WANG Jian-bin;ZHOU Chao-qun;TONG Yong-qiang;XU Yi-liang. Experimental Study on the Measurement of Subsurface Damage of Ground Sapphire by Corrosion Method [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(12): 2216-2221.
[2]	WEI Ye;ZHOU Bing;SANG Sheng-bo;DENG Xiao;CHAI Jing;CHEN Ze-hua;ZHANG Wen-dong. Mechanism Study on Size Effects of Cluster Implantation on Silicon [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(6): 1064-1071.
[3]	GUO Yu;PENG Tong-hua;LIU Chun-jun;YUAN Wen-xia;CAI Zhen-li;ZHANG He;WANG Bo. Key Parameters of Chemical Mechanical Polishing for Obtaining Defect Free 4H-type Conductive SiC Substrate Surface [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(5): 759-765.
[4]	XU Long-hua;XU Chong-hai;WU Guang-yong;XIAO Guang-chun;YI Ming-dong. Preparation of CaF2 Powder Coated with Ni-B by Ultrasonic Electroless Plating [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(1): 252-258.
[5]	CHEN Jin;YANG Ying;XING Qing-qing;ZHANG Li;CHAO Miao-miao;MU Mei-shan. Sulfur Passivation Processing on Silicon Surface of 6H-SiC [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(11): 3000-3004.
[6]	LIANG Qing-rui;HU Xiao-bo;CHEN Xiu-fang;XU Xian-gang;ZONG Yan-min;WANG Xi-jie. Chemical Mechanical Polishing of 4H-SiC with Strong Oxidizing Slurry [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(7): 1741-1747.
[7]	LIANG Qing-rui;ZONG Yan-min;WANG Xi-jie;CHEN Xiu-fang;XU Xian-gang;HU Xiao-bo. Effect of Diamond Powder on SiC Mechanical Polishing [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(2): 295-300.
[8]	WANG Jin-pu;BAI Lin-shan;CHU Xiang-feng. Investigation on Chemical Mechanical Polish of Glass Ceramics Substrate of Hard Disk [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(1): 216-220.
[9]	LI Feng;YANG Ying;LI Bi-shan;CHEN Jin;XING Qing-qing;HOU Zhi-bin. Research on the Effect and Stability of Sulfur-passivated Si(100) Surface [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2014, 43(7): 1657-1661.
[10]	. Characteristic of FTIR Absorption Spectrum of Ge-doped CZSi [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2004, 33(5): 792-796.

Effect of Different Abrasives on Sapphire Chemical-Mechanical Polishing

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 10

Recommended Articles

Metrics

Comments