Comparison between Wet Film and Dry Film Photolithography Fabrication of ITO Electrode

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (6): 1143-1147.

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Comparison between Wet Film and Dry Film Photolithography Fabrication of ITO Electrode

YAN Hui-min;GUO Ying;ZHU Hua-xin;LIU Gui-lin;ZHU Bing-jie;LI Shuai;LI Guo-hua

Online:2013-06-15 Published:2021-01-20

Abstract

CLC Number:

TN27

YAN Hui-min;GUO Ying;ZHU Hua-xin;LIU Gui-lin;ZHU Bing-jie;LI Shuai;LI Guo-hua. Comparison between Wet Film and Dry Film Photolithography Fabrication of ITO Electrode[J]. Journal of Synthetic Crystals, 2013, 42(6): 1143-1147.

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Comparison between Wet Film and Dry Film Photolithography Fabrication of ITO Electrode

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