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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (10): 2761-2766.
GAO Yu-wei;ZHOU Bing-qing;ZHANG Lin-rui;ZHANG Long-long
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RSSOnline:2014-10-15
Published:2021-01-20
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GAO Yu-wei;ZHOU Bing-qing;ZHANG Lin-rui;ZHANG Long-long. Study on Structures and Properties of Microcrystalline Silicon Films Prepared by Hot Wire Chemical Vapor Deposition[J]. Journal of Synthetic Crystals, 2014, 43(10): 2761-2766.
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