Fabrication and Characterization of Global Strained Si on Insulator

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (2): 420-425.

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Fabrication and Characterization of Global Strained Si on Insulator

LIU Xu-yan;WANG Ai-hua;CUI Ming-yue;QIN Yi;LU Dao-bang;LI Gen-quan

Online:2014-02-15 Published:2021-01-20

Abstract

CLC Number:

TN304

LIU Xu-yan;WANG Ai-hua;CUI Ming-yue;QIN Yi;LU Dao-bang;LI Gen-quan. Fabrication and Characterization of Global Strained Si on Insulator[J]. Journal of Synthetic Crystals, 2014, 43(2): 420-425.

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Fabrication and Characterization of Global Strained Si on Insulator

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