Study on the Effect of Substrate Temperature on the Structure of a-Si∶ H/c-Si(100) Thin Film by Molecular Dynamics Simulation

JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (6): 1453-1459.

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Study on the Effect of Substrate Temperature on the Structure of a-Si∶ H/c-Si(100) Thin Film by Molecular Dynamics Simulation

ZHOU Nai-gen;HU Qiu-fa;XU Wen-xiang;WU Xiao-yuan;HUANG Hai-bin;ZHOU Lang

Online:2014-06-15 Published:2021-01-20

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CLC Number:

O751

ZHOU Nai-gen;HU Qiu-fa;XU Wen-xiang;WU Xiao-yuan;HUANG Hai-bin;ZHOU Lang. Study on the Effect of Substrate Temperature on the Structure of a-Si∶ H/c-Si(100) Thin Film by Molecular Dynamics Simulation[J]. Journal of Synthetic Crystals, 2014, 43(6): 1453-1459.

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Study on the Effect of Substrate Temperature on the Structure of a-Si∶ H/c-Si(100) Thin Film by Molecular Dynamics Simulation

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