Effects of Abrasive Grain on Removal Rate in Atomization CMP

JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (7): 1729-1733.

Previous Articles Next Articles

Effects of Abrasive Grain on Removal Rate in Atomization CMP

WANG Chen;LI Qing-zhong;ZHU Bing

Online:2014-07-15 Published:2021-01-20

Abstract

CLC Number:

TH161+.14

WANG Chen;LI Qing-zhong;ZHU Bing. Effects of Abrasive Grain on Removal Rate in Atomization CMP[J]. Journal of Synthetic Crystals, 2014, 43(7): 1729-1733.

Effects of Abrasive Grain on Removal Rate in Atomization CMP

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 1

Recommended Articles

Metrics

Comments