Growth and Structural Characterization of Polycrystalline Silicon Film Pulsed on 6H-SiC Substrate by HWCVD

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (8): 1965-1969.

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Growth and Structural Characterization of Polycrystalline Silicon Film Pulsed on 6H-SiC Substrate by HWCVD

GAO Zhan-jun;CHEN Zhi-ming;LI Lian-bi;ZHAO Meng;HUANG Lei

Online:2014-08-15 Published:2021-01-20

Abstract

CLC Number:

TN304.1

GAO Zhan-jun;CHEN Zhi-ming;LI Lian-bi;ZHAO Meng;HUANG Lei. Growth and Structural Characterization of Polycrystalline Silicon Film Pulsed on 6H-SiC Substrate by HWCVD[J]. Journal of Synthetic Crystals, 2014, 43(8): 1965-1969.

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Growth and Structural Characterization of Polycrystalline Silicon Film Pulsed on 6H-SiC Substrate by HWCVD

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