Study on the Chemical Mechanical Polishing of ZnSe

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (1): 61-65.

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Study on the Chemical Mechanical Polishing of ZnSe

WU Chuan-chao;AN Yong-quan;WANG Zhi-bin;YANG Chang-qing;ZHANG Rui

Online:2015-01-15 Published:2021-01-20

Abstract

CLC Number:

O786

WU Chuan-chao;AN Yong-quan;WANG Zhi-bin;YANG Chang-qing;ZHANG Rui. Study on the Chemical Mechanical Polishing of ZnSe[J]. Journal of Synthetic Crystals, 2015, 44(1): 61-65.

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Study on the Chemical Mechanical Polishing of ZnSe

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