Heteroepitaxial Nucleation of Diamond on Ir(100)/MgO(100) Substrate by Bias Enhanced Microwave Plasma Chemical Vapor Deposition Method

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (4): 896-901.

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Heteroepitaxial Nucleation of Diamond on Ir(100)/MgO(100) Substrate by Bias Enhanced Microwave Plasma Chemical Vapor Deposition Method

LI Yi-feng;SHE Jian-min;SU Jing-jie;TANG Wei-zhong;LI Xiao-min;XU Xiao-ke

Online:2015-04-15 Published:2021-01-20

Abstract

CLC Number:

TQ164

LI Yi-feng;SHE Jian-min;SU Jing-jie;TANG Wei-zhong;LI Xiao-min;XU Xiao-ke. Heteroepitaxial Nucleation of Diamond on Ir(100)/MgO(100) Substrate by Bias Enhanced Microwave Plasma Chemical Vapor Deposition Method[J]. Journal of Synthetic Crystals, 2015, 44(4): 896-901.

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Heteroepitaxial Nucleation of Diamond on Ir(100)/MgO(100) Substrate by Bias Enhanced Microwave Plasma Chemical Vapor Deposition Method

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