Numerical Simulation and Experimental Study of a Novel High-power Microwave Plasma CVD Reactor for Diamond Films Deposition

JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (6): 1544-1550.

Previous Articles Next Articles

Numerical Simulation and Experimental Study of a Novel High-power Microwave Plasma CVD Reactor for Diamond Films Deposition

AN Kang;LIU Xiao-ping;LI Xiao-jing;ZHONG Qiang;SHEN Yan-yan;HE Zhi-yong;YU Sheng-wang

Online:2015-06-15 Published:2021-01-20

Abstract

CLC Number:

AN Kang;LIU Xiao-ping;LI Xiao-jing;ZHONG Qiang;SHEN Yan-yan;HE Zhi-yong;YU Sheng-wang. Numerical Simulation and Experimental Study of a Novel High-power Microwave Plasma CVD Reactor for Diamond Films Deposition[J]. Journal of Synthetic Crystals, 2015, 44(6): 1544-1550.

[1]	WU Zhenyu, JIA Mengmeng, HOU Xiaohan, LIU Fucheng, FAN Weili. Band Gap Characteristics of h-BN Superlattice Plasma Photonic Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(2): 252-260.
[2]	LIANG Yue-qiang;FAN Wei-li;GONG Dan-dan. Review of Research Progress on Plasma Photonic Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2018, 47(10): 2051-2057.
[3]	WANG Xiao-yu;LI Hua-fang;SHI Song;TANG Shi-chuan;WANG Jin-liang. Influence of Silver Nanoparticle Surface Coverage on Optical Absorption Properties of Amorphous Silicon Thin Film [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(5): 1203-1206.
[4]	ZHANG Jin-yan;QIU Su-yan;WEI Yi-hua;YUAN Li-juan;LUO Lin-guang. Hydrothermal Synthesis and Characterization of Water Soluble CdTe Quantum Dots Using Mercapto-acetate Acid as Stabilizer [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(2): 551-557.
[5]	WEI Jian-ping;TANG Da-pei. 3D Numerical Simulation of Multiple Coupling Fields in a Magnetic Controlled DC Plasma Torch [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2014, 43(12): 3301-3305.
[6]	YUAN Jia-jing;LU Wen-zhuang;WANG Hong-jun;XU Feng;ZUO Dun-wen. Study on Fabrication of Diamond Microstructure Based on Model Replication Technique [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(5): 1141-1145.
[7]	LI Xiao-jing;YU Sheng-wang;ZHANG Si-kai;TANG Wei-zhong;LV Fan-xiu. Numerical Simulation of Plasma in Novel Plasma Reactor for MPCVD Diamond Film [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(4): 867-871.

Numerical Simulation and Experimental Study of a Novel High-power Microwave Plasma CVD Reactor for Diamond Films Deposition

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 7

Recommended Articles

Metrics

Comments