Research on the Factors Limiting to Reduce the Thickness of Silicon Wafers

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (7): 1719-1724.

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Research on the Factors Limiting to Reduce the Thickness of Silicon Wafers

LIU Teng-yun;GE Pei-qi;GAO Yu-fei

Online:2015-07-15 Published:2021-01-20

Abstract

CLC Number:

O786

LIU Teng-yun;GE Pei-qi;GAO Yu-fei. Research on the Factors Limiting to Reduce the Thickness of Silicon Wafers[J]. Journal of Synthetic Crystals, 2015, 44(7): 1719-1724.

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Research on the Factors Limiting to Reduce the Thickness of Silicon Wafers

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