Welcome to Journal of Synthetic Crystals! Today is Share:

JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (7): 1741-1747.

Previous Articles     Next Articles

Chemical Mechanical Polishing of 4H-SiC with Strong Oxidizing Slurry

LIANG Qing-rui;HU Xiao-bo;CHEN Xiu-fang;XU Xian-gang;ZONG Yan-min;WANG Xi-jie   

  • Online:2015-07-15 Published:2021-01-20

CLC Number: