Study of Low Temperature Liquid Phase (001) Epitaxy of p-type Doped Crystalline Silicon

JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (8): 2078-2083.

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Study of Low Temperature Liquid Phase (001) Epitaxy of p-type Doped Crystalline Silicon

ZHANG Fan;XIAO Zhi-Gang;ZHOU Lang

Online:2015-08-15 Published:2021-01-20

Abstract

CLC Number:

TN204

ZHANG Fan;XIAO Zhi-Gang;ZHOU Lang. Study of Low Temperature Liquid Phase (001) Epitaxy of p-type Doped Crystalline Silicon[J]. Journal of Synthetic Crystals, 2015, 44(8): 2078-2083.

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Study of Low Temperature Liquid Phase (001) Epitaxy of p-type Doped Crystalline Silicon

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