Study on the Chemical Mechanical Polishing Technique of CVD Diamond

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (1): 73-79.

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Study on the Chemical Mechanical Polishing Technique of CVD Diamond

YUAN Ze-wei;JIN Zhu-ji;LI Qiang;DU Hai-yang

Online:2016-01-15 Published:2021-01-20

Abstract

CLC Number:

TH161

YUAN Ze-wei;JIN Zhu-ji;LI Qiang;DU Hai-yang. Study on the Chemical Mechanical Polishing Technique of CVD Diamond[J]. Journal of Synthetic Crystals, 2016, 45(1): 73-79.

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Study on the Chemical Mechanical Polishing Technique of CVD Diamond

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