Study on Highly Transparent Conductive ZnO Thin Films Deposited by Reactive Magnetron Sputtering Method

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (3): 711-717.

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Study on Highly Transparent Conductive ZnO Thin Films Deposited by Reactive Magnetron Sputtering Method

XIE Ting;ZHU Bai-lin;YANG Yu-ting;ZHANG Jun-feng;LONG Xiao-yang;WU Jun

Published:2021-01-20

Abstract

CLC Number:

TN304

XIE Ting;ZHU Bai-lin;YANG Yu-ting;ZHANG Jun-feng;LONG Xiao-yang;WU Jun. Study on Highly Transparent Conductive ZnO Thin Films Deposited by Reactive Magnetron Sputtering Method[J]. Journal of Synthetic Crystals, 2016, 45(3): 711-717.

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Study on Highly Transparent Conductive ZnO Thin Films Deposited by Reactive Magnetron Sputtering Method

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