Uniform Variation of Large-area Diamond Films Deposited by MPCVD with Different Gas-inlet and-outlet Locations

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (4): 906-912.

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Uniform Variation of Large-area Diamond Films Deposited by MPCVD with Different Gas-inlet and-outlet Locations

ZHONG Qiang;HEI Hong-jun;LI Xiao-jing;ZHANG A-li;SHEN Yan-yan;LIU Xiao-ping;YU Sheng-wang

Online:2016-04-15 Published:2021-01-20

Abstract

CLC Number:

TG174

ZHONG Qiang;HEI Hong-jun;LI Xiao-jing;ZHANG A-li;SHEN Yan-yan;LIU Xiao-ping;YU Sheng-wang. Uniform Variation of Large-area Diamond Films Deposited by MPCVD with Different Gas-inlet and-outlet Locations[J]. Journal of Synthetic Crystals, 2016, 45(4): 906-912.

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Uniform Variation of Large-area Diamond Films Deposited by MPCVD with Different Gas-inlet and-outlet Locations

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