Research on Grinding Performance of Fixed-abrasive Diamond Lapping Plates for Sapphire Substrates

JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (5): 1317-1322.

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Research on Grinding Performance of Fixed-abrasive Diamond Lapping Plates for Sapphire Substrates

LIN Zhi-fu;GAO Shang;KANG Ren-ke;WANG Zi-guang;GENG Zong-chao

Online:2016-05-15 Published:2021-01-20

Abstract

CLC Number:

TG580.6

LIN Zhi-fu;GAO Shang;KANG Ren-ke;WANG Zi-guang;GENG Zong-chao. Research on Grinding Performance of Fixed-abrasive Diamond Lapping Plates for Sapphire Substrates[J]. Journal of Synthetic Crystals, 2016, 45(5): 1317-1322.

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Research on Grinding Performance of Fixed-abrasive Diamond Lapping Plates for Sapphire Substrates

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