Influence of Substrate Temperature on the Structure and Optical Properties of SiCx Thin Films Contained Silicon Quantum Dots

JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (8): 2044-2049.

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Influence of Substrate Temperature on the Structure and Optical Properties of SiCx Thin Films Contained Silicon Quantum Dots

ZHAO Fei;YANG Wen;CHEN Xiao-bo;YUAN Jun-bao;YANG Pei-zhi

Online:2016-08-15 Published:2021-01-20

Abstract

CLC Number:

O484.5

ZHAO Fei;YANG Wen;CHEN Xiao-bo;YUAN Jun-bao;YANG Pei-zhi. Influence of Substrate Temperature on the Structure and Optical Properties of SiCx Thin Films Contained Silicon Quantum Dots[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(8): 2044-2049.

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Influence of Substrate Temperature on the Structure and Optical Properties of SiCx Thin Films Contained Silicon Quantum Dots

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