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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (9): 2322-2325.
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WUREN Tu-ya;ZHOU Bing-qing;GAO Ai-ming;BU Xin-xin;DING De-song
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RSSOnline:2016-09-15
Published:2021-01-20
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WUREN Tu-ya;ZHOU Bing-qing;GAO Ai-ming;BU Xin-xin;DING De-song. Effect of Radio-frequency Power on Bond Structures and Properties of Silicon-rich Silicon Nitride Thin Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(9): 2322-2325.
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