Abstract: Metallized layer was prepared by normal Mo-Mn progress on the surface of the oxidized AlN ceramics, which were prepared by pressureless sintering method.And the Mo-Mn/Ni composite metallized layer was obtained by plating nickel on the surface of the Mo-Mn metal layer.The effects of oxidation and metallization of AlN ceramics on thermal property, mechanical property, surface phase composition and microstructure were studied.The results show that a uniform Al2O3 layer is prepared on the surface of AlN ceramics after oxidized at 1100 ℃ for 3 h.Thermal conductivity and flexural strength increase by 6.2; and 26.6;, respectively.Mo-Mn/Ni composite metallization layer is generate on the oxidized AlN sample by Mo-Mn progress and electroless plating process.The thickness of the Mo-Mn/Ni composite metallization layer prepared on the suface of AlN ceramic is about 28 μm.The diffusion layer is formed among the Al2O3 layer, Mo-Mn layer and Ni layer through the migration of elements, and the interlayer combinations are tight.The thermal diffusivity increase by 3.8; compared with the AlN ceramic substrate.

Key words: Metallized layer was prepared by normal Mo-Mn progress on the surface of the oxidized AlN ceramics, which were prepared by pressureless sintering method.And the Mo-Mn/Ni composite metallized layer was obtained by plating nickel on the surface of the Mo-Mn metal layer.The effects of oxidation and metallization of AlN ceramics on thermal property, mechanical property, surface phase composition and microstructure were studied.The results show that a uniform Al2O3 layer is prepared on the surface of AlN ceramics after oxidized at 1100 ℃ for 3 h.Thermal conductivity and flexural strength increase by 6.2; and 26.6;, respectively.Mo-Mn/Ni composite metallization layer is generate on the oxidized AlN sample by Mo-Mn progress and electroless plating process.The thickness of the Mo-Mn/Ni composite metallization layer prepared on the suface of AlN ceramic is about 28 μm.The diffusion layer is formed among the Al2O3 layer, Mo-Mn layer and Ni layer through the migration of elements, and the interlayer combinations are tight.The thermal diffusivity increase by 3.8; compared with the AlN ceramic substrate.