Abstract: The manufacture process of SU-8 photo resist mold for micro fluidic chips was described, and microfluidic chip which can realize single passing of micro balloons was successfully made.Processes including former bake, bake, lithography, imaging and other process have great impacts on SU-8 mold.A mold making process for reference was proposed, and anti-adhesive layer process was also discussed.Finally, through these studies on process, a mold was produced and used in fluid successfully, and micro balloon of 12 μm has finish its job of single pass and been detected.

Key words: The manufacture process of SU-8 photo resist mold for micro fluidic chips was described, and microfluidic chip which can realize single passing of micro balloons was successfully made.Processes including former bake, bake, lithography, imaging and other process have great impacts on SU-8 mold.A mold making process for reference was proposed, and anti-adhesive layer process was also discussed.Finally, through these studies on process, a mold was produced and used in fluid successfully, and micro balloon of 12 μm has finish its job of single pass and been detected.