Study on Decompression Diffusion of High Square Resistance with Dense Grid Technology

JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (12): 2659-2662.

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Study on Decompression Diffusion of High Square Resistance with Dense Grid Technology

WANG Yi-lin;REN Zhe;ZHAO Zhi-ran;ZHANG Wei

Online:2018-12-15 Published:2021-01-20

Abstract

CLC Number:

TN305.4

WANG Yi-lin;REN Zhe;ZHAO Zhi-ran;ZHANG Wei. Study on Decompression Diffusion of High Square Resistance with Dense Grid Technology[J]. Journal of Synthetic Crystals, 2018, 47(12): 2659-2662.

Study on Decompression Diffusion of High Square Resistance with Dense Grid Technology

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