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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (2): 297-301.
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WENG Xiu-zhang;ZHOU Bing-qing;GU Xin
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RSSOnline:2018-02-15
Published:2021-01-20
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WENG Xiu-zhang;ZHOU Bing-qing;GU Xin. Influence of PECVD Deposition Parameters on the Transition from Amorphous Silicon to Microcrystalline Silicon Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2018, 47(2): 297-301.
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