Effect of Cationic Surfactant on Chemical Mechanical Polishing Efficiency of a-plane Sapphire

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (3): 470-475.

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Effect of Cationic Surfactant on Chemical Mechanical Polishing Efficiency of a-plane Sapphire

BAI Ya-wen;CHEN Guo-mei;TENG Kang;NI Zi-feng

Online:2018-03-15 Published:2021-01-20

Abstract

CLC Number:

O786

BAI Ya-wen;CHEN Guo-mei;TENG Kang;NI Zi-feng. Effect of Cationic Surfactant on Chemical Mechanical Polishing Efficiency of a-plane Sapphire[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2018, 47(3): 470-475.

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Effect of Cationic Surfactant on Chemical Mechanical Polishing Efficiency of a-plane Sapphire

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