Density Functional Theory Study on Gas Reaction Mechanism in AlN MOVPE

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (3): 481-488.

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Density Functional Theory Study on Gas Reaction Mechanism in AlN MOVPE

ZHANG Lian;ZHANG Hong;ZUO Ran

Online:2018-03-15 Published:2021-01-20

Abstract

CLC Number:

TN304

ZHANG Lian;ZHANG Hong;ZUO Ran. Density Functional Theory Study on Gas Reaction Mechanism in AlN MOVPE[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2018, 47(3): 481-488.

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Density Functional Theory Study on Gas Reaction Mechanism in AlN MOVPE

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