Introduction of Chemical Mechanical Grinding(CMG)on Single Crystal Silicon Wafer

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (4): 715-720.

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Introduction of Chemical Mechanical Grinding(CMG)on Single Crystal Silicon Wafer

WANG Jian-bin;ZHOU Li-bo

Online:2018-04-15 Published:2021-01-20

Abstract

CLC Number:

TH16

WANG Jian-bin;ZHOU Li-bo. Introduction of Chemical Mechanical Grinding(CMG)on Single Crystal Silicon Wafer[J]. Journal of Synthetic Crystals, 2018, 47(4): 715-720.

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Introduction of Chemical Mechanical Grinding(CMG)on Single Crystal Silicon Wafer

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